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3 October 2003 Testing optical surfaces by high-precision diffractive null lenses with integrated reference surface
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Abstract
Fizeau interferometers with an additional diffractive optical element are frequently used for measuring spherical and aspherical surfaces. We present a new design, were the Fizeau principle is now perfectly fulfilled, by generating reference and measuring wavefront on the last optical surface, carrying a diffractive optical element. Several advantages of this design are discussed and proved experimentally.
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Alexander G. Poleshchuk, Vadim Cherkashin, and Jean-Michel Asfour "Testing optical surfaces by high-precision diffractive null lenses with integrated reference surface", Proc. SPIE 5145, Microsystems Engineering: Metrology and Inspection III, (3 October 2003); doi: 10.1117/12.500295; https://doi.org/10.1117/12.500295
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