Accuracy vs. complexity: tradeoffs in OPC options

Bartosz Banachowicz; Walter Iandolo; Artur P. Balasinski; Wolfgang Staud; Melody W. Ma; Jason Sweis

doi:10.1117/12.514949

28 May 2003 Accuracy vs. complexity: OPC solutions and tradeoffs

Bartosz Banachowicz, Walter Iandolo, Artur P. Balasinski, Wolfgang Staud, Melody W. Ma, Jason Sweis

Proceedings Volume 5148, 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents; (2003) https://doi.org/10.1117/12.514949
Event: 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 2003, Sonthofen, Germany

Abstract

Evolution of Optical Proximity Correction (OPC) methodology with the continuing shrink of feature size indicates a gradual shift towards increasingly more complex solutions, i.e., from rule based to model based OPC. The key underlying reason is to provide adequate accuracy ofpattern reproduction despite the growing sub-wavelength gap, i.e., the difference between minimum feature size and the wavelength used to print it [1 ]. However, full chip implementation of these complex solutions would increase CAD flow/mask generation runtimes and database file sizes, therefore compromising reticle manufacturability. In order to select optimal OPC routines based on feedback from process, CAD, design, and mask engineering, we proposed a methodology and investigated tradeoffs between correction accuracy and database complexity. Rule-based OPC, i.e., corrections defined by a set ofwidth and spacing proximity rules rely on a limited set oftest geometries and can't be made sensitive to the environment ofthe feature. In contrast, model based OPC features are generated for the actual layout environment and can be changed depending on the adopted photolithography process. Another degree of freedom is provided by the rule or model calibration. We defined and discussed complexity and accuracy criteria such as the size ofthe database and the number of silicon imaging errors.

Citation Download Citation

Bartosz Banachowicz, Walter Iandolo, Artur P. Balasinski, Wolfgang Staud, Melody W. Ma, and Jason Sweis "Accuracy vs. complexity: OPC solutions and tradeoffs", Proc. SPIE 5148, 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents, (28 May 2003); https://doi.org/10.1117/12.514949

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