Inspecting alternating phase shift masks by matching stepper conditions

Shirley Hemar; Anja Rosenbusch

doi:10.1117/12.515103

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28 May 2003 Inspecting alternating phase-shift masks by matching stepper conditions

Shirley Hemar, Anja Rosenbusch

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Proceedings Volume 5148, 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents; (2003) https://doi.org/10.1117/12.515103
Event: 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 2003, Sonthofen, Germany

Abstract

The paper presents a new technology to inspect alternating phase shifting masks. Instead of finding defects based on a size-dependent defect specification, defects are found according to their impact at the wafer CD result. The inspection methodology used is aerial imaging. Phase effects are taking into account inherently. The main advantage of this method is that only defects, which actually affect the wafer result, will be detected and classified. The paper presents first inspection results on alternating phase shifting test masks designed for the 70nm generation.

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Shirley Hemar and Anja Rosenbusch "Inspecting alternating phase-shift masks by matching stepper conditions", Proc. SPIE 5148, 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents, (28 May 2003); https://doi.org/10.1117/12.515103

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