Author Affiliations +
Rik M. Jonckheere,1 Vicky Philipsen,1 Gerd Scheuring,2 Frank Hillmann,2 Hans-Jurgen Brueck,2 Volodymyr Ordynskyy,3 Kai Peter,3 Andrew C. Hourd,4 Thomas Schaetz,5 Shiuh-Bin Chen,6 Parkson W. Chen,6 Karl Sommer7
1IMEC vzw (Belgium)
2MueTec GmbH (Germany)
3PDF Solutions GmbH (Germany)
4Compugraphics International Ltd. (United Kingdom)
5Infineon Technologies AG (Germany)
6Taiwan Mask Corp. (Taiwan)
7Karl Sommer Consulting (Germany)