Paper
12 January 2004 Fully depleted back-illuminated p-channel CCD development
Christopher J. Bebek, John H. Bercovitz, Donald E. Groom, Stephen E. Holland, Richard W. Kadel, Armin Karcher, William F. Kolbe, Hakeem M. Oluseyi, Nick P. Palaio, V. Prasad, Bojan T. Turko, Guobin Wang
Author Affiliations +
Abstract
An overview of CCD development efforts at Lawrence Berkeley National Laboratory is presented. Operation of fully-depleted, back-illuminated CCD's fabricated on high resistivity silicon is described, along with results on the use of such CCD's at ground-based observatories. Radiation damage and point-spread function measurements are described, as well as discussion of CCD fabrication technologies.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christopher J. Bebek, John H. Bercovitz, Donald E. Groom, Stephen E. Holland, Richard W. Kadel, Armin Karcher, William F. Kolbe, Hakeem M. Oluseyi, Nick P. Palaio, V. Prasad, Bojan T. Turko, and Guobin Wang "Fully depleted back-illuminated p-channel CCD development", Proc. SPIE 5167, Focal Plane Arrays for Space Telescopes, (12 January 2004); https://doi.org/10.1117/12.506221
Lens.org Logo
CITATIONS
Cited by 7 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Charge-coupled devices

Back illuminated sensors

Semiconducting wafers

Point spread functions

Silicon

Observatories

Temperature metrology

RELATED CONTENT

Temperature dependence of dark current in a CCD
Proceedings of SPIE (April 24 2002)
Improved Uniformity In Thinned Scientific CCDs
Proceedings of SPIE (December 22 1989)
Development of fully depleted scientific CCDs for astronomy
Proceedings of SPIE (February 21 2007)
Back-illuminated large-format Loral CCDs
Proceedings of SPIE (July 01 1991)
Diffusion dark current in CCDs and CMOS image sensors
Proceedings of SPIE (February 29 2008)

Back to Top