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24 December 2003 Development of an ultrahigh-precision x-ray optics
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We are developing an ultra high precision Soft X-ray telescope. The design of the telescope is a normal incident one for 13.5 nm band using Mo/Si multilayers. Two ideas are introduced. One is the optical measurement system in order to monitor the precision of the optics system. The other is the adaptive optics system with a deformable mirror. Using an X ray-optical separation filter, we can always monitor the deformation of the optics by optical light. With this information, we can control the deformable mirror to compensate the system distortion as a closed loop system. We confirmed that the absolute precision of the wave front sensor was less than 3 nm rms. This is also confirmed that the determination of the image center of each micro lens can be ~1/100 of the pixel size. The precision of the deformable mirror was roughly 5 nm rms. Using the closed loop control the accuracy of the repeatability of the shape of the deformable mirror is less than 2 nm rms. The shape of the primary mirror was an off-axis paraboloide with an effective diameter of 80 mm. This primary mirror was coated by Mo/Si multilayers. The reflectivity of the primary mirror at 13.5 nm was ranging from 30 to 50%. The X ray-optical separation filter was made from Zr with a thickness of ~170 nm. The transmission of the filter for low energy X-ray measured and was roughly 50% at thickness of ~170 nm. The transmission of the filter for low energy X-ray was measured and was roughly 50% at 13.5 nm.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shunji Kitamoto, Haruko Takano, Harue Saitoh, Norimasa Yamamoto, Takayoshi Kohmura, Kazuharu Suga, Hiroyuki Sekiguchi, Yohei Ohkawa, Jun'ichi Kanai, and Shigeto Chiba "Development of an ultrahigh-precision x-ray optics", Proc. SPIE 5169, Astronomical Adaptive Optics Systems and Applications, (24 December 2003);


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