10 November 2003 Self-aligned optofiber/waveguide connector with integrated V-grooves and diffractive optical elements
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Abstract
We demonstrate a novel type of self-aligned optofiber/waveguide connector with integrated V-grooves and diffractive optical elements. The self-alignment is achieved by connecting micro-structures which have originally been formed in silicon and later replicated in concave and convex forms. V-grooves hold the optical fibers and the light is coupled out through diffractive optical elements (DOEs). A manufacturing process has been developed which allows both deep micro-structures (V-grooves and alignment structures) and shallow surface reliefs (diffractive elements) to be realized on the same substrate. The self-alignment using microstructures allows a positioning accuracy of about ±5μm. Two different fan-out DOEs have been optically characterized.
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Fredrik K. Nikolajeff, Fredrik K. Nikolajeff, Olle Larsson, Olle Larsson, Sverker Hard, Sverker Hard, Maria Kindlundh, Maria Kindlundh, } "Self-aligned optofiber/waveguide connector with integrated V-grooves and diffractive optical elements", Proc. SPIE 5177, Gradient Index, Miniature, and Diffractive Optical Systems III, (10 November 2003); doi: 10.1117/12.509971; https://doi.org/10.1117/12.509971
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