12 December 2003 Lightweight mirrors from single-crystal silicon
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A process for fabricating high quality light weight mirrors from single crystal silicon is described. The process uses conventional fabrication techniques in an unconventional sequence. It is capable of producing mirrors with 1/4th the mass of an equivalent solid quartz mirror. Each mirror is a monolithic structure of single crystal silicon. Mirrors with optical figures better than 1/10th wave peak-to-valley (@633 nm) have been demonstrated.
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Vincent T. Bly, Vincent T. Bly, David A. Content, David A. Content, John G. Hagopian, John G. Hagopian, Linette D. Kolos, Linette D. Kolos, David O. Moore, David O. Moore, } "Lightweight mirrors from single-crystal silicon", Proc. SPIE 5179, Optical Materials and Structures Technologies, (12 December 2003); doi: 10.1117/12.511569; https://doi.org/10.1117/12.511569

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