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22 December 2003 Calibration of high-speed optical profiler
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Abstract
Optical profilers that employ white-light interferometry (WLI) techniques are widely used in industry and research to map surface structures with precise sub-nanometer resolution. The accuracy, repeatability and consistency of these instruments depend mainly on the proper calibration of two parameters: the mean wavelength and the scanner speed. Equally important in industrial applications is high throughput of measuring devices; high throughput can be achieved by increasing the speed of the measurement, which in turn reduces the sampling rate of the interference signal. Again, exact calibration of the system is the key to obtaining accurate measurements. Our solution for calibrating the system involves inserting into the optical profiler a second, laser-based, reference signal interferometer that creates a primary length standard for calibration. This innovation allows for substantially improved performance and repeatability at different measurement speeds up to 100 microns per second and over an 8 millimeter scanning range.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Joanna Schmit, Michael Krell, and Erik Novak "Calibration of high-speed optical profiler", Proc. SPIE 5180, Optical Manufacturing and Testing V, (22 December 2003); https://doi.org/10.1117/12.504930
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