22 December 2003 Characterization of aspherical surface that has high numerical aperture by using a computer-generated hologram
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Abstract
Recently the lens fabrication technique is developed so fast that an aspherical surface is often used to achieve better imaging performance or reduce number of elements. Especially the popularity of micro-optics and miniature imaging system makes the use of aspherical optics very common. However the metrology of aspherical micro-optics has been disregarded and outpaced by the fabrication technique. It results in the lack of ignorance of metrology for aspherical micro-optics. This paper suggests the simple and cost-effective methodology for aspherical micro-optics by using computer generated hologram (CGH). Although the CGH technique is well-known and well-established technique for relatively larger aspherical optics, it is seldom used for micro-optics testing where there is higher demand of aspherical optics testing. By reporting the success of aspherical micro-optics testing in this paper, we confirm that CGH technique will play an important role to answer new demand of metrology.
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Junwon Lee, Junwon Lee, Artur Olzak, Artur Olzak, Chen Liang, Chen Liang, Michael R. Descour, Michael R. Descour, } "Characterization of aspherical surface that has high numerical aperture by using a computer-generated hologram", Proc. SPIE 5180, Optical Manufacturing and Testing V, (22 December 2003); doi: 10.1117/12.506621; https://doi.org/10.1117/12.506621
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