3 November 2003 Micro-optical element on SiN membrane
Author Affiliations +
Optical elements, such as grating, holographic optical element and Fresnel lens, are made on the SiN membrane. The SiN film was deposited on the silicon wafer by low pressure chemical vapor deposition (LPCVD). Its advantages include the high transmission efficiency, light weight, and easy packaging for the Si-based optical pickup head.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jenq Yang Chang, Jenq Yang Chang, Yu Cheng Chang, Yu Cheng Chang, Chien Chieh Lee, Chien Chieh Lee, Chi Ming Wang, Chi Ming Wang, } "Micro-optical element on SiN membrane", Proc. SPIE 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II, (3 November 2003); doi: 10.1117/12.504415; https://doi.org/10.1117/12.504415

Back to Top