3 November 2003 Micro-optical element on SiN membrane
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Abstract
Optical elements, such as grating, holographic optical element and Fresnel lens, are made on the SiN membrane. The SiN film was deposited on the silicon wafer by low pressure chemical vapor deposition (LPCVD). Its advantages include the high transmission efficiency, light weight, and easy packaging for the Si-based optical pickup head.
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Jenq Yang Chang, Yu Cheng Chang, Chien Chieh Lee, Chi Ming Wang, "Micro-optical element on SiN membrane", Proc. SPIE 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II, (3 November 2003); doi: 10.1117/12.504415; https://doi.org/10.1117/12.504415
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