Ring-coded halftone masks for the fabrication of circular micro-optical elements

Changtao Wang; Chunlei Du

doi:10.1117/12.507028

3 November 2003 Ring-coded halftone masks for the fabrication of circular micro-optical elements

Changtao Wang, Chunlei Du

Proceedings Volume 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II; (2003) https://doi.org/10.1117/12.507028
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

A new alternative coding method is proposed for the fabrication of circular diffractive optical elements with half tone masks, in which a series of rings with variant widths are used to produce desired gray distribution. Analytical analysis of this coding method is given and illustrated with numerical simulation examples.

Citation Download Citation

Changtao Wang and Chunlei Du "Ring-coded halftone masks for the fabrication of circular micro-optical elements", Proc. SPIE 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II, (3 November 2003); https://doi.org/10.1117/12.507028

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