Wafer-scale micro-optics replication technology

Markus Rossi; Hartmut Rudmann; Brigitte Marty; Andreas Maciossek

doi:10.1117/12.507769

3 November 2003 Wafer-scale micro-optics replication technology

Markus Rossi, Hartmut Rudmann, Brigitte Marty, Andreas Maciossek

Proceedings Volume 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II; (2003) https://doi.org/10.1117/12.507769
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

For many high-volume applications of micro-optical elements and systems the most cost-effective fabrication technology is replication in polymer materials with techniques such as UV embossing, hot embossing, and injection molding. Replication significantly reduces the cost in volume production in comparison to silicon-based etched components. However, the temperature and humidity stability of most commercial polymers is not suitable for the application of replicated elements in areas such as telecom or datacom. A process based on UV-replication in chemically durable polymers has been developed. Technologies for all fabrication steps from mastering over tooling to replication on wafer-scale, post-processing and characterization are described. We present results of various projects with double-sided micro-optics for telecom/datacom and various sensor applications.

Citation Download Citation

Markus Rossi, Hartmut Rudmann, Brigitte Marty, and Andreas Maciossek "Wafer-scale micro-optics replication technology", Proc. SPIE 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II, (3 November 2003); https://doi.org/10.1117/12.507769

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