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4 November 2003 Image detection system for 157-nm using fluorescent glass
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Abstract
An image detection system for vacuum ultra-violet region used a F2 laser (157nm) as a light source is proposed. A fluorescent glass (LUMILASS-G9) is employed to convert UV light into visible light. Characteristics of fluorescent glass are studied. Some beam profiles of F2 laser are analyzed as a demonstration of the imaging detection. A VUV interferometer is proposed.
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Yukitoshi Otani, Masakatsu Takahashi, Lianhua Jin, Hiroyuki Kowa, and Norihiro Umeda "Image detection system for 157-nm using fluorescent glass", Proc. SPIE 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies, (4 November 2003); doi: 10.1117/12.506755; https://doi.org/10.1117/12.506755
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