16 October 2003 Appearance characterization by a scatterometer employing a hemispherical screen
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Characterization of optical appearance by measurement of the hemispherical scattering distribution using a concave projection screen and a camera is investigated. Secondary intensities by repeated internal screen reflections can be measured separately and compensated for. The concept is coupled to functional properties of product surfaces and we use it in an industrial environment. Only little less accurate than a photogoniometer, the hardware is much cheaper, contains no moving parts and is up to 1000 times faster.
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Sipke Wadman, Sipke Wadman, Stefan Baumer, Stefan Baumer, } "Appearance characterization by a scatterometer employing a hemispherical screen", Proc. SPIE 5189, Surface Scattering and Diffraction III, (16 October 2003); doi: 10.1117/12.503560; https://doi.org/10.1117/12.503560


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