Developments on the NMi-VSL traceable scanning probe microscope

Kai Dirscherl; K. Richard Koops

doi:10.1117/12.503082

20 November 2003 Developments on the NMi-VSL traceable scanning probe microscope

Kai Dirscherl, K. Richard Koops

Proceedings Volume 5190, Recent Developments in Traceable Dimensional Measurements II; (2003) https://doi.org/10.1117/12.503082
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

We will report on the progress of our project to realize a traceable Scanning Probe Microscope at the Van Swinden Laboratorium of the Nederlands Meetinstituut in the Netherlands. The traceable Atomic Force Microscope (AFM) is constructed from a separate AFM head, a 3D translation stage and an accurate 3D laser interferometer system. Nanometer uncertainty can be maintained in the entire scanning volume of 100 μm × 100 μm × 20 μm. Apart from providing direct traceability to the SI unit of length, the coordinates provided by the laser interferometer are also used in a closed loop position feedback controller to realize accurate positioning at arbitrary locations within the volume provided by the translation stage. In this paper we will emphasize the development of the control system.

Citation Download Citation

Kai Dirscherl and K. Richard Koops "Developments on the NMi-VSL traceable scanning probe microscope", Proc. SPIE 5190, Recent Developments in Traceable Dimensional Measurements II, (20 November 2003); https://doi.org/10.1117/12.503082

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