Laser interferometer for calibration of a line scale module with analog output

Ichiro Fujima; Yasuaki Fujimoto; Kaoru Sasaki; Hideaki Yoshimori; Shigeo Iwasaki; Souichi Telada; Hirokazu Matsumoto

doi:10.1117/12.508118

20 November 2003 Laser interferometer for calibration of a line scale module with analog output

Ichiro Fujima, Yasuaki Fujimoto, Kaoru Sasaki, Hideaki Yoshimori, Shigeo Iwasaki, Souichi Telada, Hirokazu Matsumoto

Proceedings Volume 5190, Recent Developments in Traceable Dimensional Measurements II; (2003) https://doi.org/10.1117/12.508118
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

NMIJ line standard interferometer has been modified for measurement of a linear scale module with analog output. The interferometer was developed for line standard calibration. The light source is a stabilized He-Ne laser. Before the modification, a line standard can be calibrated with an uncertainty of about 0.2 micrometer for the total length of 500 mm (k=2). After the modification, a linear scale module can be calibrated as well as a line standard. A linear scale is set in a support on a moving carriage. The displacement of the moving carriage is measured by the interferometer with a sampling frequency of 30 kHz to 300 kHz while the electronic output of the linear scale module is sampled with the same timing. The analog output of the line scale module is used instead of digital output because it is important to assure the simultaneous sampling of the displacement and the scale output.

Citation Download Citation

Ichiro Fujima, Yasuaki Fujimoto, Kaoru Sasaki, Hideaki Yoshimori, Shigeo Iwasaki, Souichi Telada, and Hirokazu Matsumoto "Laser interferometer for calibration of a line scale module with analog output", Proc. SPIE 5190, Recent Developments in Traceable Dimensional Measurements II, (20 November 2003); https://doi.org/10.1117/12.508118

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