Miniature interferometers for applications in microtechnology and nanotechnology

Gerd Jager; Eberhard Manske; Tino Hausotte; Roland Fußl; Rainer Grunwald; Hans Buchner; Walter Schott; Denys Dontsov

doi:10.1117/12.507906

20 November 2003 Miniature interferometers for applications in microtechnology and nanotechnology

Gerd Jager, Eberhard Manske, Tino Hausotte, Roland Fußl, Rainer Grunwald, Hans Buchner, Walter Schott, Denys Dontsov

Author Affiliations +

Proceedings Volume 5190, Recent Developments in Traceable Dimensional Measurements II; (2003) https://doi.org/10.1117/12.507906
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

An initial description of the design and operation of compact miniature interferometers that employ fiberoptic lightguides for all of their optical couplings and are suitable for general-purpose use is followed by a metrological analysis of their mode of operation and examples of their broad applicability, based on several typical instrumental setups.

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Gerd Jager, Eberhard Manske, Tino Hausotte, Roland Fußl, Rainer Grunwald, Hans Buchner, Walter Schott, and Denys Dontsov "Miniature interferometers for applications in microtechnology and nanotechnology", Proc. SPIE 5190, Recent Developments in Traceable Dimensional Measurements II, (20 November 2003); https://doi.org/10.1117/12.507906

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