20 November 2003 Miniature interferometers for applications in microtechnology and nanotechnology
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Abstract
An initial description of the design and operation of compact miniature interferometers that employ fiberoptic lightguides for all of their optical couplings and are suitable for general-purpose use is followed by a metrological analysis of their mode of operation and examples of their broad applicability, based on several typical instrumental setups.
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Gerd Jager, Gerd Jager, Eberhard Manske, Eberhard Manske, Tino Hausotte, Tino Hausotte, Roland Fußl, Roland Fußl, Rainer Grunwald, Rainer Grunwald, Hans Buchner, Hans Buchner, Walter Schott, Walter Schott, Denys Dontsov, Denys Dontsov, } "Miniature interferometers for applications in microtechnology and nanotechnology", Proc. SPIE 5190, Recent Developments in Traceable Dimensional Measurements II, (20 November 2003); doi: 10.1117/12.507906; https://doi.org/10.1117/12.507906
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