20 November 2003 Minimizing interferometer misalignment errors for measurement of subnanometer length changes
Author Affiliations +
Abstract
The detailed knowledge of thermal expansion and dimensional stability of low expansion materials is of growing interest and requires measurements of length changes with sub nm uncertainty. In addition to accurately defined environmental conditions the interferometer adjustment, namely the number of fringes covering the sample and also the method of autocollimation adjustment, become more important. Their influence, investigated with PTB's precision interferometer, will be discussed.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rene Schoedel, Rene Schoedel, Arnold Nicolaus, Arnold Nicolaus, Gerhard Boensch, Gerhard Boensch, } "Minimizing interferometer misalignment errors for measurement of subnanometer length changes", Proc. SPIE 5190, Recent Developments in Traceable Dimensional Measurements II, (20 November 2003); doi: 10.1117/12.503677; https://doi.org/10.1117/12.503677
PROCEEDINGS
9 PAGES


SHARE
Back to Top