Next-generation Kösters interferometer

Jennifer E Decker; Rene Schodel; Gerhard Bonsch

doi:10.1117/12.503565

20 November 2003 Next-generation Kosters interferometer

Jennifer E Decker, Rene Schodel, Gerhard Bonsch

Proceedings Volume 5190, Recent Developments in Traceable Dimensional Measurements II; (2003) https://doi.org/10.1117/12.503565
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

Modification of an interferometer instrument for highest accuracy calibration of long gauge blocks is presented. The interferometer design employs a Kosters prism, and a built-in 1 metre long vacuum cell for evaluation of refractive index of air in the direct neighborhood of the gauge block. The measurement set-up also includes platinum resistance thermometers and thermocouples for accurate measurements of gauge block temperature. Principles of the measurement method, including the application of phase stepping interferometry to both the length measurement and the correction for refractive index of air, are described in detail.

Citation Download Citation

Jennifer E Decker, Rene Schodel, and Gerhard Bonsch "Next-generation Kosters interferometer", Proc. SPIE 5190, Recent Developments in Traceable Dimensional Measurements II, (20 November 2003); https://doi.org/10.1117/12.503565

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