Recent activities at PTB nanometer comparator

Jens Flugge; Rainer Koning; Harald Bosse

doi:10.1117/12.506908

20 November 2003 Recent activities at PTB nanometer comparator

Jens Flugge, Rainer Koning, Harald Bosse

Proceedings Volume 5190, Recent Developments in Traceable Dimensional Measurements II; (2003) https://doi.org/10.1117/12.506908
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

The PTB in cooperation with the Dr. Johannes Heidenhain GmbH built up a new length comparator with a measurement range of 610 mm for 1D length measurements on line scales, linear encoders and interferometers. The PTB nanometer comparator was retrofitted and now allows a stable operation of the interferometer. To investigate the actual measurement performance a few line scales and a linear encoder were measured and compared with results from other comparators. The results are discussed and recent developments at the nanometer comparator are described.

Citation Download Citation

Jens Flugge, Rainer Koning, and Harald Bosse "Recent activities at PTB nanometer comparator", Proc. SPIE 5190, Recent Developments in Traceable Dimensional Measurements II, (20 November 2003); https://doi.org/10.1117/12.506908

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