10 November 2003 Point-diffraction interferometer for 3D profile measurement of rough surfaces
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Abstract
We present a point-diffraction interferometer specially devised for the profile measurement of rough surfaces that are difficult to be measured with conventional two-arm interferometers. The diffraction interferometer comprises multiple two-point-diffraction sources made of a pair of single-mode optical fibers, and performs an absolute profile measurement by projecting multiple fringe patterns on the object surface and then fitting measured phase data into a global geometrical model of multilateration. Test measurement results demonstrate that the proposed point-diffraction interferometer is well suited for the warpage inspection of microelectronics components with excessive height irregularities, such as unpolished backsides of silicon wafers and plastic molds of integrated-circuit chip packages.
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Seung-Woo Kim, Seung-Woo Kim, Byoung-Chang Kim, Byoung-Chang Kim, } "Point-diffraction interferometer for 3D profile measurement of rough surfaces", Proc. SPIE 5191, Optical Diagnostics for Fluids, Solids, and Combustion II, (10 November 2003); doi: 10.1117/12.507074; https://doi.org/10.1117/12.507074
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