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13 January 2004 Development of a figure correction method having spatial resolution close to 0.1 mm
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Abstract
A new figure correction method is applied to fabricate an elliptical mirror to realize a one-dimensionally diverging X-ray beam having high image quality. Mutual relations between figure errors and intensity uniformities of diverging X-ray beams are also investigated using a wave-optical simulator and indicate that figure errors in relatively short spatial wavelength ranges lead to high-contrast interference fringes. By using the microstitching interferometer and elastic emission machining, figure correction of an elliptical mirror with lateral resolution close to 0.1mm was carried out. A one-dimensional diverging X-ray obtained by the fabricated mirror was observed at SPring-8 and evaluated to have a sufficiently flat intensity distribution.
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Yuzo Mori, Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Katsuyoshi Endo, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, and Tetsuya Ishikawa "Development of a figure correction method having spatial resolution close to 0.1 mm", Proc. SPIE 5193, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications, (13 January 2004); https://doi.org/10.1117/12.520825
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