13 January 2004 EUV collectors: design, development, fabrication, and testing
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Abstract
EUV sources are designed to emit radiation around 13.5 nm wavelength into a solid angle of up to 2π sr. With a suitable Wolter type 1 grazing incidence optic such EUV photons can be collected with high efficiency and focussed onto a preferred target. Such Wolter type 1 collectors are characterized by densely nested concentric and confocal mirror shells with fixed distance from the source and the intermediate image. In this paper we will report on optical and mechanical design, development, fabrication and testing of nested Wolter type 1 collectors, capable of collecting and imaging EUV photons at 13.5 nm wavelength with high efficiency.
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Wilhelm J. Egle, Wilhelm J. Egle, Wolfgang Hafner, Wolfgang Hafner, Axel Matthes, Axel Matthes, Eral Erzin, Eral Erzin, Bernhard Gaenswein, Bernhard Gaenswein, Herbert Schwarz, Herbert Schwarz, Piotr Marczuk, Piotr Marczuk, Martin Antoni, Martin Antoni, Wolfgang Singer, Wolfgang Singer, Frank Melzer, Frank Melzer, Joachim Hainz, Joachim Hainz, } "EUV collectors: design, development, fabrication, and testing", Proc. SPIE 5193, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications, (13 January 2004); doi: 10.1117/12.507736; https://doi.org/10.1117/12.507736
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