7 January 2004 Compact electron-based EUV and ultrashort hard x-ray sources
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A review of our progress in the realization of an ultrashort-pulse laser-driven hard-x-ray source based on the combination of a femtosecond laser system with an x-ray diode is given. New results on the development of electron-based compact EUV sources for "at-wavelength" metrology are presented. Detailed investigations of spectral, spatial, and temporal characteristics of both sources are performed and possible applications are discussed.
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Andre Egbert, Andre Egbert, Boris N. Chichkov, Boris N. Chichkov, } "Compact electron-based EUV and ultrashort hard x-ray sources", Proc. SPIE 5196, Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications, (7 January 2004); doi: 10.1117/12.499589; https://doi.org/10.1117/12.499589

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