19 December 2003 New techniques for the measurement of x-ray beam or x-ray optics quality
Author Affiliations +
Metrology of XUV beams and more specifically X-ray laser (XRL) beam is of crucial importance for development of applications. We have then developed several new optical systems enabling to measure the x-ray laser optical properties. By use of a Michelson interferometer working as a Fourier-Transform spectrometer, the line shapes of different x-ray lasers have been measured with an unprecedented accuracy (δλ/λ~10-6). Achievement of the first XUV wavefront sensor has enable to measure the beam quality of laser-pumped as well as discharge pumped x-ray lasers. Capillary discharge XRL has demonstrated a very good wavefront allowing to achieve intensity as high 3*1014 Wcm-2 by focusing with a f = 5 cm mirror. The measured sensor accuracy is as good as λ/120 at 13 nm. Commercial developments are under way.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Philippe Zeitoun, Philippe Zeitoun, Philippe Balcou, Philippe Balcou, Samuel Bucourt, Samuel Bucourt, Djamel Benredjem, Djamel Benredjem, Franck Delmotte, Franck Delmotte, Guillaume Dovillaire, Guillaume Dovillaire, Denis Douillet, Denis Douillet, James Dunn, James Dunn, G. Faivre, G. Faivre, Marta Fajardo, Marta Fajardo, Kenneth A. Goldberg, Kenneth A. Goldberg, Mourad Idir, Mourad Idir, Sebastien Hubert, Sebastien Hubert, Jim Hunter, Jim Hunter, Sylvie Jacquemot, Sylvie Jacquemot, Sophie Kazamias, Sophie Kazamias, Sebastien le Pape, Sebastien le Pape, Xavier Levecq, Xavier Levecq, Ciaran L. S. Lewis, Ciaran L. S. Lewis, Remy Marmoret, Remy Marmoret, Pascal Mercere, Pascal Mercere, A. S. Morlens, A. S. Morlens, Patrick P. Naulleau, Patrick P. Naulleau, Christian Remond, Christian Remond, Jorge J. Rocca, Jorge J. Rocca, Stephane Sebban, Stephane Sebban, Raymond F. Smith, Raymond F. Smith, Marie-Francoise Ravet, Marie-Francoise Ravet, Philippe Troussel, Philippe Troussel, Constance Valentin, Constance Valentin, Laurent Vanbostal, Laurent Vanbostal, } "New techniques for the measurement of x-ray beam or x-ray optics quality", Proc. SPIE 5197, Soft X-Ray Lasers and Applications V, (19 December 2003); doi: 10.1117/12.508183; https://doi.org/10.1117/12.508183


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