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12 December 2003Symmetric color separation gratings
We describe a new kind of symmetric color separation grating (SCSG), which can be applied to separate the frequency-tripling (3ω)light from the basic (1ω) and frequency-doubling (2ω)lights. The profile of the proposed SCSG is a three-level symmetric structure in one period, thus it is easy to fabricate it with the much improved tolerance of mask misalignment without the decrese of the efficiency of the frequency-tripling light. We have analyzed the principles of the SCSGs by employing the scalar diffraction theory and fabricated them experimentally by means of binary optics technology. The theoretical and experimental results demonstrated that the proposed SCSGs can be made in a comparatively easy way for the symmetric structure that can effectively avoid the effect of the fabrication error due to mask misalignment, thus higher manufacturing yield and lower cost can be achieved.