8 December 2003 Surface micromachining and characterization of pyroelectric infrared ray focal plane array utilizing Pb(Zr0.3Ti0.7)O3 thin films
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Abstract
We have developed surface micromachined Infrared ray (IR) focal plane array (FPA), in which single SiO2 layer works as an IR absorbing plate and Pb(Zr0.3Ti0.7)O3 thin film served as a thermally sensitive material. There are some advantages of applying SiO2 layer as an IR absorbing layer. First of all, the SiO2 has good IR absorbance within 8 ~ 12 μm spectrum range. Measured value showed about 60% absorbance of incident IR spectrum in the range. SiO2 layer has another important merit when applied to the top of Pt/PZT/Pt stack because it works also as a supporting membrane. Consequently, the IR absorbing layer forms one body with membrane structure, which simplifies the whole MEMS process and gives robustness to the structure.
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Sang-Ouk Ryu, Sang-Ouk Ryu, Seong-Mok Cho, Seong-Mok Cho, In-Kyu You, In-Kyu You, Sung-Min Yoon, Sung-Min Yoon, Kwi-Dong Kim, Kwi-Dong Kim, Byoung-Gon Yu, Byoung-Gon Yu, } "Surface micromachining and characterization of pyroelectric infrared ray focal plane array utilizing Pb(Zr0.3Ti0.7)O3 thin films", Proc. SPIE 5209, Materials for Infrared Detectors III, (8 December 2003); doi: 10.1117/12.507058; https://doi.org/10.1117/12.507058
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