15 October 2003 Considerations of optical microlens-array design for nano-MEMS-based optical switch arrays
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In this paper, we introduced an optical switch MEMS with 32 I/O channels. A simple formula is given as a guideline for application in nano-MEMS mirror arrays in optical cross connects networks. Minimized MEMS optical switch cannot only be linked to standard fiber but also can be connected to any other nano-scale optical devices by our designed microlens. We consider the optical switch being scale down to nano-meter order including beam radius at waist 2 μm, the tilt angle of mirror is set as 0.1(rad), the width of nano-MEMS chip is below 1000nm and optical wavelength 1.55 μm by using our designed microlens arrays.
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Shyh-Lin Tsao, Shyh-Lin Tsao, Wen-Ming Cheng, Wen-Ming Cheng, Chin-Jen Lu, Chin-Jen Lu, } "Considerations of optical microlens-array design for nano-MEMS-based optical switch arrays", Proc. SPIE 5220, Nanofabrication Technologies, (15 October 2003); doi: 10.1117/12.505783; https://doi.org/10.1117/12.505783

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