15 October 2003 Nanowire growth for sensor arrays
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Abstract
A design concept for nanowire-based sensors and arrays is described. The fabrication technique involves electrodeposition to directly grow nanowires between patterned thin film contact electrodes. To prove our concept, we have electrodeposited 1-μm diameter Pd single wires and small arrays. To demonstrate nanowire sensors, we have electrochemically grown metal (Pd, Au, Pt), metal oxide (Sb2O3), and conducting polymer (polyaniline) bundled nanowires. Using Pt bundled nanowires surface modified with glucose oxidase, we have demonstrated glucose detection as a demonstration of a biomolecular sensor.
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Minhee Yun, Minhee Yun, Nosang V. Myung, Nosang V. Myung, Richard P. Vasquez, Richard P. Vasquez, Jianjun Wang, Jianjun Wang, Harold Monbouquette, Harold Monbouquette, } "Nanowire growth for sensor arrays", Proc. SPIE 5220, Nanofabrication Technologies, (15 October 2003); doi: 10.1117/12.507189; https://doi.org/10.1117/12.507189
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