Effective grayscale in lithographically scribed planar holographic Bragg reflectors

Dmitri Iazikov; Christoph Greiner; Thomas W. Mossberg

doi:10.1117/12.517217

20 October 2003 Effective grayscale in lithographically scribed planar holographic Bragg reflectors

Dmitri Iazikov, Christoph Greiner, Thomas W. Mossberg

Proceedings Volume 5225, Nano- and Micro-Optics for Information Systems; (2003) https://doi.org/10.1117/12.517217
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

We demonstrate that holographic Bragg reflector grating structures, photolithographically scribed in planar waveguides, support a unique approach to apodization and overlay that uses fixed-depth etching and partial contour writing to achieve continuous reflective amplitude control.

Citation Download Citation

Dmitri Iazikov, Christoph Greiner, and Thomas W. Mossberg "Effective grayscale in lithographically scribed planar holographic Bragg reflectors", Proc. SPIE 5225, Nano- and Micro-Optics for Information Systems, (20 October 2003); https://doi.org/10.1117/12.517217

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