20 October 2003 Stiction problems in releasing 3D microstructures and the solution
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Abstract
Micro-stereolithography (μSL) is capable of fabrication of highly complex three-dimensional (3D) microstructures by selectively photo-induced polymerization from the monomer resin. However, during the evaporative drying of structures from liquid resin, the 3D microstructures often collapse due to the capillary force. In this work, a theoretical model is developed to analyze the deflection and adhesion between thin polymer beams under capillary force. The detachment length of the test structures and adhesion energy of a typical μSL polymer (HDDA) are obtained experimentally which are important for MEMS structure design. Finally, we successfully developed a sublimation process to release the 3D microstructures without the adhesion.
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Dongmin Wu, Dongmin Wu, Nicholas Fang, Nicholas Fang, Cheng Sun, Cheng Sun, Xiang Zhang, Xiang Zhang, } "Stiction problems in releasing 3D microstructures and the solution", Proc. SPIE 5225, Nano- and Micro-Optics for Information Systems, (20 October 2003); doi: 10.1117/12.506644; https://doi.org/10.1117/12.506644
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