Integrated Fabry-Perot microcavity based on surface micromachining processes

Raluca Muller; Dimitrios Syvridis; M. Kusko; Dana Cristea; Dan Apostol; Victor S. Damian; M. Bercu; Elena Manea

doi:10.1117/12.520098

30 September 2003 Integrated Fabry-Perot microcavity based on surface micromachining processes

Raluca Muller, Dimitrios Syvridis, M. Kusko, Dana Cristea, Dan Apostol, Victor S. Damian, M. Bercu, Elena Manea

Proceedings Volume 5227, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies; (2003) https://doi.org/10.1117/12.520098
Event: 2003 Chapter books, 2003, Bellingham, WA, United States

Abstract

The development of MEMS microsystems can be increased by integration of optically active parts. Micromachining techniques allow the fabrication of monolithically integrated Fabry-Perot microcavities, avoiding hybrid assembly technique, which is a combination of etching and wafer bonding. These microcavities can be used as sensors, as modulators or as tunable optical filters. We investigated different mirror materials: silicon nitride and polysilicon and different sacrificial layers: polysilicon and phosphorus doped silicon dioxide (PSG), using LPCVD and CVD techniques. Different arrays and shapes for the top mirror, which is movable, were analyzed in order to establish a structural material with low tensile stress. The optical constants were determined by spectrophotometric methods. Experimental data and simulations were compared.

Citation Download Citation

Raluca Muller, Dimitrios Syvridis, M. Kusko, Dana Cristea, Dan Apostol, Victor S. Damian, M. Bercu, and Elena Manea "Integrated Fabry-Perot microcavity based on surface micromachining processes", Proc. SPIE 5227, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies, (30 September 2003); https://doi.org/10.1117/12.520098

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