30 September 2003 Micropositioning devices for optical applications
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Abstract
Many industrial applications (optical devices, micro/nanotechnology, etc.) require the development of advanced positioning systems. They should have submicronic resolution, often in a practically unlimited working range, as well to be stable, reliable and to have compact construction. By use of piezoelectric materials, devices having the potential to control the system structure and consequently the degrees of freedom of the mechanical components could be achieved. The paper presents some of the actuators, built and experimentally tested by the authors, as well as their associated mathematical models.
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Constantin I. Nitu, Constantin David P. Comeaga, Bogdan S. Gramescu, "Micropositioning devices for optical applications", Proc. SPIE 5227, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies, (30 September 2003); doi: 10.1117/12.520097; https://doi.org/10.1117/12.520097
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