30 September 2003 New feasibilities for characterizing rough surfaces by optical correlation techniques
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Abstract
New feasibilities are considered for optical correlation diagnostics of rough surfaces with different distributions of irregularities. The influence of deviations of the height surface roughness distribution from a Gaussian probability distribution on the accuracy of optical analysis is discussed. The possibilities for optical diagnostics of fractal surface structures are shown and the set of statistical and dimensional parameters of the scattered fields for surface roughness diagnostics us determined. Finally, a multifunctional measuring device for estimation of these parameters is proposed.
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Oleg V. Angelsky, Peter P. Maksimyak, "New feasibilities for characterizing rough surfaces by optical correlation techniques", Proc. SPIE 5227, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies, (30 September 2003); doi: 10.1117/12.519637; https://doi.org/10.1117/12.519637
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