Paper
6 October 2003 Functionally gradient materials of new generation fabricated by ablation and pulsed laser deposition
Boguslaw Major, Waldemar Mroz, Tadeusz Wierzchon, Reinhold Ebner
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Proceedings Volume 5229, Laser Technology VII: Applications of Lasers; (2003) https://doi.org/10.1117/12.520712
Event: Laser Technology VII: Applications of Lasers, 2002, Szczecin, Poland
Abstract
Physical basis of desorption and ablation are presented focusing mostly on the primary and secondary mechanisms and short pulses interaction with materials. Facilities used in pulse laser deposition (PLD) are discussed in respect to the PLD system working with an excimer laser which has been just set up at the Institute of Optoelectronics Military University of Technology. Directions of present and future applications are shown on the basis of the Proceedings of the last two Conferences on Laser Ablation COLA i.e. in Germany (1999) and Japan (2001). Own examinations on the PLD layers of FeAl and Ni3Al intermetallics produced using an excimer KrF as well as of TiN deposited by means of a Nd:YAG laser are presented.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Boguslaw Major, Waldemar Mroz, Tadeusz Wierzchon, and Reinhold Ebner "Functionally gradient materials of new generation fabricated by ablation and pulsed laser deposition", Proc. SPIE 5229, Laser Technology VII: Applications of Lasers, (6 October 2003); https://doi.org/10.1117/12.520712
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KEYWORDS
Laser ablation

Sputter deposition

Particles

Pulsed laser deposition

Semiconductor lasers

Plasma

Ions

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