6 October 2003 Interferometric measurements of the vibration of a silicon microbeam/cantilever unit used in atomic force microscopy (AFM)
Author Affiliations +
Proceedings Volume 5229, Laser Technology VII: Applications of Lasers; (2003) https://doi.org/10.1117/12.520761
Event: Laser Technology VII: Applications of Lasers, 2002, Szczecin, Poland
Abstract
In the paper experimental results of microbeam/cantilever vibration measurements are presented. The cantilever under investigation is used as a sensor in a Atomic Force Microscope. Double-Beam Digital Interferometry with time averaging and interferogram processing was used for optimization of vibration mode visualization. Several two-frame methods with phase step between the frames were compared with the four-frame method with phase step π/2 between consecutive frames. The experimental results obtained prove that the four-frame method is the most appropriate for further quantitative amplitude and phase analysis.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Krzysztof Patorski, Agata Jozwicka, Artur Kalinowski, "Interferometric measurements of the vibration of a silicon microbeam/cantilever unit used in atomic force microscopy (AFM)", Proc. SPIE 5229, Laser Technology VII: Applications of Lasers, (6 October 2003); doi: 10.1117/12.520761; https://doi.org/10.1117/12.520761
PROCEEDINGS
4 PAGES


SHARE
Back to Top