14 August 2003 Fluorinated polyimide waveguide film fabricated by replication process and its application to optical interconnection
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Replication processes of a fluorinated polyimide film were demonstrated using a polyimide and a quartz glass molds. A silicon-oxide was introduced on the top of the mold, which could significantly improve the separation between the mold and the fluorinated polyimide film without degrading the optical property. A single- and a multimode waveguide film were fabricated using a cladding film with grooves formed by our replication process. The multimode waveguide exhibited low optical propagation loss of 0.36dB/cm at the wavelength of 0.85um. Using the fluorinated polyimide waveguide film, a low cost optical board with vertical-cavity surface-emitting laser (VCSEL) and photodiode (PD) was developed for intra-board level optical interconnection. The edges of the multimode waveguide film were butt-coupled to a commercialized 0.85um multimode VCSEL and PD by the passive alignment technique developed. The waveguide film coupled with the VCSEL and the PD was mounted on a FR-4 printed wiring board (PWB), bending the waveguide film. The total loss of two couplings between the waveguide and optical components (VCSEL and PD) was obtained to be less than 3 dB. We confirmed that the high-bit-rate data, >3Gbps, was transmitted using the optical board on the PWB.
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Tsuyoshi Shioda, Tsuyoshi Shioda, } "Fluorinated polyimide waveguide film fabricated by replication process and its application to optical interconnection", Proc. SPIE 5246, Active and Passive Optical Components for WDM Communications III, (14 August 2003); doi: 10.1117/12.510893; https://doi.org/10.1117/12.510893

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