14 August 2003 Micromachined vertical cavities and hollow optical waveguides for widely tunable devices
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We present the design and fabrication of micromachined vertical cavity filters with stress control, which give us novel functions including temperature insensitive operation, thermal wavelength tuning, wavelength trimming and 2-D multi-wavelength integration. The temperature dependence could be freely controlled either for temperature operations or for wide wavelength tuning. In addition, we propose the use of a hollow waveguide in which light can be confined in air for realizing temperature-insensitive waveguide devices. We present various unique features in hollow waveguides and the combination with microelectro-mechanical system (MEMS) gives us novel widely tunable waveguide devices.
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Fumio Koyama, Fumio Koyama, } "Micromachined vertical cavities and hollow optical waveguides for widely tunable devices", Proc. SPIE 5246, Active and Passive Optical Components for WDM Communications III, (14 August 2003); doi: 10.1117/12.510879; https://doi.org/10.1117/12.510879

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