Determination of refractive index profile of ZrO<sub>2</sub> on amorphous and pre-evaporated substrates by reverse engineering

Vesna Janicki; Hrvoje Zorc

doi:10.1117/12.512384

25 February 2004 Determination of refractive index profile of ZrO₂ on amorphous and pre-evaporated substrates by reverse engineering

Vesna Janicki, Hrvoje Zorc

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Proceedings Volume 5250, Advances in Optical Thin Films; (2004) https://doi.org/10.1117/12.512384
Event: Optical Systems Design, 2003, St. Etienne, France

Abstract

During the last few years, refractive index profiles are being studied more intensively. Several papers have been written about the use of optical methods, spectrophotometry, ellipsometry, together with reverse engineering, these have yielded interesting results. Here we study the differences of a ZrO₂ film grown on an amorphous substrate and that of a pre-evaporated layer of another material, Y₂O₃. In the first run, two glass substrates have been coated with an Y₂O₃ layer. In the second run a bare glass substrate and the pre-coated Y₂O₃ have been coated with a ZrO₂ layer. Each of the materials used had exactly the same growth conditions for all layers. The only difference was the nature of the substrates. The spectra of R and T of both samples have been used for the optical characterisation. Multisample analysis with gradual introduction of new parameters has been carried out. It was found that for the appropriate modelling of the layer, grown on the pre-coated substrate, introduction of an interface layer between the two materials was necessary. The refractive index profiles of both ZrO₂ layers have been determined and discussed.

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Vesna Janicki and Hrvoje Zorc "Determination of refractive index profile of ZrO₂ on amorphous and pre-evaporated substrates by reverse engineering", Proc. SPIE 5250, Advances in Optical Thin Films, (25 February 2004); https://doi.org/10.1117/12.512384

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KEYWORDS

Refractive index

Glasses

Transmittance

Zirconium dioxide

Interfaces

Water

Reverse engineering

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