25 February 2004 Optical metrology of thin films using high-accuracy spectrophotometric measurements with oblique angles of incidence
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Abstract
Oblique-incidence spectrophotometric measurements are considered for reliable determination of the refractive index and thickness of thin-film coatings. By using a model of the spectral transmittance of thin film samples, the effect of systematic factors on the determined thin-film parameters is analyzed. The optical parameters of a silicon-dioxide sample determined from the experimental results obtained with the HUT spectrophotometer are consistent for the incidence angles between 0 and 56.4 degrees, demonstrating high accuracy of film-parameter determination.
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Saulius Nevas, Saulius Nevas, Farshid Manoocheri, Farshid Manoocheri, Erkki Ikonen, Erkki Ikonen, Alexander V. Tikhonravov, Alexander V. Tikhonravov, Michail A. Kokarev, Michail A. Kokarev, Michail K. Trubetskov, Michail K. Trubetskov, } "Optical metrology of thin films using high-accuracy spectrophotometric measurements with oblique angles of incidence", Proc. SPIE 5250, Advances in Optical Thin Films, (25 February 2004); doi: 10.1117/12.512700; https://doi.org/10.1117/12.512700
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