25 February 2004 Uniformity analysis and design optimization of multilayer thin film filters used in fiber optics communication systems
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Abstract
Thin film filters used in fibre optics communications are strictly defined, which requires a totally uniform thickness distribution over the coated substrate. In this paper we firstly analyse the thickness distribution related to chamber geometry and source emission function. Chamber layout and source function are optimised for large area uniformity.
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Minghong Yang, Jinsong Liu, Qingming Chen, Bo Zhang, "Uniformity analysis and design optimization of multilayer thin film filters used in fiber optics communication systems", Proc. SPIE 5250, Advances in Optical Thin Films, (25 February 2004); doi: 10.1117/12.531887; https://doi.org/10.1117/12.531887
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