19 February 2004 Low-cost amorphous silicon-based 160x120 uncooled microbolometer 2D array for high-volume applications
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Proceedings Volume 5251, Detectors and Associated Signal Processing; (2004); doi: 10.1117/12.515958
Event: Optical Systems Design, 2003, St. Etienne, France
Abstract
Uncooled infrared focal plane arrays are being developed for a wide range of thermal imaging applications. Developments are focused on the improvement of their sensitivity enabling the possibility of reducing the pixel pitch in order to decrease the total system (size and weight) by using smaller optics. The amorphous silicon technology is the latest one developed by CEA / LETI and transferred to ULIS to manufacture 160 x 120 2D arrays. We developed for this device a low cost package based on existing technologies. This device is well adapted to high volume process control applications where spatial resolution (in terms of pixel number) is less important than device costs.
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Cyrille Trouilleau, Arnaud Crastes, Jean-Luc Tissot, Jean-Pierre Chatard, Jean-Jacques Yon, Astrid Astier, "Low-cost amorphous silicon-based 160x120 uncooled microbolometer 2D array for high-volume applications", Proc. SPIE 5251, Detectors and Associated Signal Processing, (19 February 2004); doi: 10.1117/12.515958; http://dx.doi.org/10.1117/12.515958
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KEYWORDS
Amorphous silicon

Readout integrated circuits

Microbolometers

Sensors

Temperature metrology

Silicon

Manufacturing

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