26 February 2004 Compact high resolution four wave lateral shearing interferometer
Author Affiliations +
A simple, ultra-compact, four wave achromatic interferometric technique is used to measure with high accuracy and high transverse resolution wavefront of polychromatic lightsource. The wave front to be measured is replicated by a diffraction grating into four copies interfering together leading to an interference pattern very similar to the intensity distribution obtained in the focal plane of a Shack-Hartmann microlens array. The grating is made of optical glass modulated in depth on top of which a chromium mask is printed. The amplitude mask acts like a Hartmann plate. Used in association with the phase mask, it allows suppression of the unwanted zero and second orders. A CCD detector located in the vicinity of the grating records the interference pattern. This new wavefront sensor is able to resolve wavefront spatial frequencies 3 to 4 times higher than a conventional Shack-Hartmann technique using an equivalent CCD detector. Its dynamic is also much higher.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jean-Christophe F Chanteloup, Mathieu Cohen, "Compact high resolution four wave lateral shearing interferometer", Proc. SPIE 5252, Optical Fabrication, Testing, and Metrology, (26 February 2004); doi: 10.1117/12.513739; https://doi.org/10.1117/12.513739


Increase of dynamic range of a Shack Hartmann sensor by...
Proceedings of SPIE (December 23 2004)
Holographic wavefront sensor
Proceedings of SPIE (August 30 2005)
Pyramidal wavefront sensor using diffractive lenses
Proceedings of SPIE (September 13 2012)

Back to Top