26 February 2004 High-resolution metrology of optical components by spectral interferometry
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Abstract
In this paper we describe an interferometric process using a polychromatic light source and a spectroscopic detection system. This method is used for surface metrology or for bulk optical components characterisation (dispersion for example). As classical monochromatic interferometry, it consists in comparing a reference wave front with one issued from the component to be tested. However this measurement is assumed by determination of the spectral dispersion induced upon the various frequencies of the light source spectrum. The aim of this work is both dispersion measurements and characterisation of aspherical surfaces
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David Reolon, David Reolon, Gerald Brun, Gerald Brun, Karim Ben Houcine, Karim Ben Houcine, Isabelle Verrier, Isabelle Verrier, Colette Veillas, Colette Veillas, Maxime Jacquot, Maxime Jacquot, } "High-resolution metrology of optical components by spectral interferometry", Proc. SPIE 5252, Optical Fabrication, Testing, and Metrology, (26 February 2004); doi: 10.1117/12.513400; https://doi.org/10.1117/12.513400
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