26 February 2004 Picometer-resolution assessment of the period constancy in a FBG phase mask
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An ultra-high resolution measurement technique makes the assessment of the period uniformity in a long grating used as a phase mask for Fibre Bragg Gratings (FBG). It comprizes a pair of two identical displacement sensors placed close to each other at a strictly constant spacing flying over the grating under test at an essentially constant velocity. The phase difference between the two sensors is a simple function of the local spatial frequency of the grating. A proper solution of an inverse problem provides the period variation along the grating. The technique is used here to characterize phase masks fabricated by means of a MEBES 4500 electron beam pattern generator. The period does not deviate by more than 3 pm from the prescribed period over a length by more than 100 mm.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yves Jourlin, Yves Jourlin, Alexandre V. Tishchenko, Alexandre V. Tishchenko, C. Pedri, C. Pedri, Andrew G. Zanzal, Andrew G. Zanzal, James Unruh, James Unruh, } "Picometer-resolution assessment of the period constancy in a FBG phase mask", Proc. SPIE 5252, Optical Fabrication, Testing, and Metrology, (26 February 2004); doi: 10.1117/12.513696; https://doi.org/10.1117/12.513696

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