2 September 2003 Development of a 3-DOF in-parallel compliant micromotion stage for micromanipulation
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Proceedings Volume 5253, Fifth International Symposium on Instrumentation and Control Technology; (2003) https://doi.org/10.1117/12.522201
Event: Fifth International Symposium on Instrumentation and Control Technology, 2003, Beijing, China
Abstract
This paper addresses the design and control issues of a novel micromanipulator which uses a 3-DOF parallel compliant mechanism driven by PZT actuators. Based on the pseudo-rigid-body model of the mechanism, both its conceptual design considerations and the final prototype are outlined first. In order to achieve a fine close-loop control for the PZT, a control law called Variable Speed Integral PI with Switched Parameters is employed based on a simplified but effective dynamic model of PZT actuators. Results from performance testing of the prototype compliant micromanipulator demonstrate that it has repeatability with less than 1 micron. The compliant stage is used as a high-precision bioengineering-oriented micromanipulator.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jingjun Yu, Jingjun Yu, Shusheng Bi, Shusheng Bi, Guanghua Zong, Guanghua Zong, } "Development of a 3-DOF in-parallel compliant micromotion stage for micromanipulation", Proc. SPIE 5253, Fifth International Symposium on Instrumentation and Control Technology, (2 September 2003); doi: 10.1117/12.522201; https://doi.org/10.1117/12.522201
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