2 September 2003 On-line vision measurement system for small thickness
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Proceedings Volume 5253, Fifth International Symposium on Instrumentation and Control Technology; (2003) https://doi.org/10.1117/12.521689
Event: Fifth International Symposium on Instrumentation and Control Technology, 2003, Beijing, China
Abstract
A novel vision measurement system specially designed for on-line measurement of thickness of micrograph of work-piece is presented. This system consists of CCD camera, telecentric microscopic lens, illumination, image sampling and processing unit etc. The telecentric microscopic lens and relating LED illumination system is carefully designed to fit the environment on-line such as: illumination, vibration, noise light and out-of focus so as to reduce the measurement error. The following image processing techniques are studied. (1) a new image preprocessing method based on gray level, gradient and spatial information is developed to get rid of the noise in image. (2) several image segmentation methods and the results are analyzed and the evaluation system of image segmentation and the relating evaluation standards are discussed to satisfy the requirement of on-line automatic image segmentation. Finally, an iterative least-square method is utilized to calculate the thickness of the micrograph in order to improve the measurement precision further. The results show that the precision of the vision measurement system is sub-pixel, which can fully satisfy the requirement of industry.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Huijie Zhao, Yonggang Li, Peng Du, "On-line vision measurement system for small thickness", Proc. SPIE 5253, Fifth International Symposium on Instrumentation and Control Technology, (2 September 2003); doi: 10.1117/12.521689; https://doi.org/10.1117/12.521689
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