17 December 2003 Flows for model-based layout correction of mask proximity effects
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Abstract
In this paper, we will investigate methods for adapting model-based OPC tools to do layout correction (biasing) for mask makgin proximity effects. (Mask Proximity Correction). We will discuss three aspects of this problem: (1) typical models to use for mask making; (2) calibration of the model using mask measurement data; (3) one-pass versus two-pass flows for correction of mask making proximity effects.
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Nicolas B. Cobb, Wilhelm Maurer, "Flows for model-based layout correction of mask proximity effects", Proc. SPIE 5256, 23rd Annual BACUS Symposium on Photomask Technology, (17 December 2003); doi: 10.1117/12.518477; https://doi.org/10.1117/12.518477
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